Abstract: Mechtronic failure analysis investigates stress-induced failure behavior under monotonic or cyclic electric loads. New research topics of mechtronicfailure analysis include electric fracture, electric fatigue, electromigration, andmigration-induced damage. The present paper surveys the field and typical topicsof mechtronic failure analysis. In-depth discussions are given for two subjects:fracture and fatigue mechanisms by electrostriction, and the mechtronic processof void damage induced by electromigration...